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日立无尘室运行指导标准
日立无尘室运行指导标准
1.0目的Purpose
规范运行、操作程序，确保日立设施管理的流畅。
Standardized operation procedure to ensure smooth flow in facility operation management in HGSP.
2.0范围Range
适用于日立龙岗工厂无尘室系统。
For HGSP Clean Room system.
3.0职责Duty
3.1 运行技术员：负责无尘室运行参数的监控。
Operation technician: monitor operation parameters in Clean Room.
3.2 运行班长：带领本班组技术员对日立龙岗工厂的设施运行进行监控，发现问题、解决问题，并按照汇报程序及时向上级汇报。
Shift Leader: Lead technicians in monitoring HGSP facility operation, discover and solve issue, report to supervisor according to report procedure.
3.3 工程师：负责运行操作程序的编写、更新、培训，对运行操作提供技术支持，发现问题、分析问题、解决问题，并按照汇报程序及时向上级汇报；
Engineer: Write and update operation procedure. Train technicians, discover analyze and provide solution to the issues, report to supervisor according to reporting procedure.
4.0定义Definition
RAU Recycle Air Unit 循环空气机
FFU Fan Filter Unit 风机过滤机
AHU Air Handling Unit空气处理机
MAU Make up Air Unit 新风机
DCP Dry Coil Pump三次泵
RAS Return Air System回风廊
5.0程序Procedure
5.1系统简介：system brief introduction:
本系统包括3台新晃新风处理机，设备安装在A栋一层新风机房，3台并列运行；82台
RAU，设备安装在A栋无尘室的回风廊处；4173台FFU，设备安装在洁净的天花板上；1台AHU设备安装在干鞋区的天花板上；10台传递窗，设备安装在无尘室内；26台风淋室，2个风淋通道；6台排风机，设备安装在A栋一层新风机房。系统的作用:MAU将室外新风经过滤，预热，加湿，冷却除湿，加压，加热及化学过滤处理后送入无尘室内的高架地板下，FFU将回风廊处的风加压，经过高效过滤器过滤后送入无尘室内，吹到高架地板下，和新风混合后被吸入RAU内经过表冷器处理。6台排风机，将生产中产生的废气排到室外。AHU将为干鞋区提供热风，将洗干净的洁净鞋吹干。风淋室和风淋通道在工作人员进入无尘室时吹净工作人员身上的灰尘。
There are 3 MAUs running parallel in MAU Room of Building A. 82 RAUs been installed in RAS in the clean roomof Building A. 4173 FFUs been installed in the ceiling of Clean Room. 1 AHU been installed at the ceiling of Shoe Dryer Room. 10 pass windows been installed in Clean Room. 2 air-shower tunnels and 26 air shower pass boxes;6 EXF been installed in the RAU Room of Building A. The system function is as follows: ensure the makeup air is filtered,pre-heat, humidify, Cooling & dehumidify, pressurize, chemical filtered and heatedbefore delivering to Clean Room. FFU in the ceiling sends the air into clean room via HEPA filter, which is used under the raised floor mixed with the make up air, and then is drawn into RAU. After being cooled in the RAU, the make up air enters FFU that completes the whole cycle. 6 EXF machines will withdraw exhausted gas out of the clean room. Cleaned Clean Room shoes were dried by hot air from AHU in the Shoe Dryer Room. Air-shower tunnels and Air Shower pass box will removed the dust on staff as they are entering clean room.
系统建设商：日立建设
System contractor: HPC
系统要求：
System demand:
|
Facility |
Parameter |
Specification |
Actual record frequency |
|
|
CL 100 |
CL 10k |
|||
|
Cleanroom |
Temperature |
23 ± 2oC |
23 ± 2oC |
On line |
|
Humidity |
50 ± 10%RH |
50 ± 10%RH |
On line |
|
|
Pressurization |
≥ 12 Pa |
≥ 12 Pa |
On line |
|
|
Airflow Rate |
0.35 ±0.1m/s |
0.35 ±0.1m/s |
Once a year |
|
5.2启动前的检查：
Before start check:
5.2.1 检查MAU盘柜上电压是否正常，开关状态；
Check MAU panel voltage, on-off state;
5.2.2 检查冷冻水水温及水压是否正常；
Check chilled water temperature and pressure
5.2.3 检查热水水温及水压是否正常；
Check hot water temperature and pressure
5.2.4 检查RAU盘柜上的电压是否正常；
Check RAU panel voltage
5.2.5 检查FFU控制盘柜上的电压是否正常；
Check FFU control panel voltage
5.2.6 检查排风机控制盘柜上的电压是否正常；
Check EXF control panel voltage
5.2.7 检查DCP盘柜上的电压是否正常
Check DCP panel voltage
5.3启动（远程）：
Start(Remote):
5.3.1 将MAU控制柜的转换开关置于“远程”；
Set MAU control panel switch in “Remote”
5.3.2 在控制系统画面上启动MAU；
Start MAU in control system interface;
5.3.3 在控制系统画面上启动DCP；
Start DCP in control system interface;
5.3.4 现场启动RAU的风机；
Local start RAU fans;
5.3.5 现场启动FFU的主电控制回路；
Local start FFU main electrical control circuit;
5.3.6 设定好适当的转速，在FFU控制画面上点击系统---全部---运行，启动所有的FFU，
Set proper rotate speed, control the FFU by clicking the proper icon oninterface, start all FFU,
5.3.7 在控制系统画面上启动排风机；
Start EXF from system control interface;
5.3.8 观察系统各项参数；
Monitor system parameters;
5.4停机（远程）：
Stop (Remote)
5.4.1 在控制系统上停止排风机；
Stop EXF from control system;
5.4.2 在FFU控制系统上将所有的FFU停止
Stop all FFU on FFU control system
5.4.3 现场关闭RAU风机；
Local close RAU;
5.4.4 在控制系统上将DCP停止运行；
Stop DCP on control system;
5.4.5 在控制系统上将MAU停止运行；
Stop MAU on control system;
5.4.6 观察系统状态并做好相应该挂牌标识工作
Monitor system state and tag out.
5.5故障紧急处理：
Emergency process:
5.5.1故障现象：
Failure phenomenon:
1.系统报警
System alarm
2．温湿度，正压指标超标；
Temperature, humidity and pressure over sepc.
3．系统断电；
System power off
4．尘粒超标报警
Particle over spec.
（原文链接：http://www.iwuchen.com/a-775/）
5.5.2故障原因：
Failure cause:
1.显示系统有故障或是有参数超标
Display system failure or parameter over spec.
2．系统存在不完善,控制精度达不到；
System faultiness, short of precision
3．紧急停电；
Urgency power off;
4．系统脏或是系统密封不良
System cleanliness or improper air seal.
5.5.3汇报流程
Monitoring process
1．如果无尘室室的温度低于21度或是高于25度，需加强监控并及时向系统工程部汇报并通知生产部。
If temperature in Clean Room over sepc.(21◦C ~ 25◦C), technician on duty must strengthen monitor and report to both Eng Dept. and MFG.
2．如果无尘室的湿度低于40%或是高于60%，需加强监控并及时向系统工程师汇报并通知生产部。
If humidity in Clean Room over 60% or below 40% spec. technician on duty must strengthen monitor and report to both project engineer. and MFG.
3．如果无尘室室的正压低于12Pa，及时向系统工程汇报并通知生产部。
If pressure in Clean Room blew 12Pa, technician on duty must strengthen monitor and report to both Eng Dept. and MFG.
5.5.4处理措施：
Corrections:
1. 手动复位报警信号，如果信号复位还是报故障则向项目工程师或是领导报告。
Handle reset alarm signal, if there is still in failure, technician on duty must report to project engineer or leader.
2. 确认系统温湿度，正压超标点，如果温度偏低（低于21度）将此温度探头控制点的温度设定点改高0.5度，如果温度偏高（高于25度）将此温度探头控制点的温度设定点改低0.5度，如果无尘室内的某个探头湿度高（高于60%）则检查此区的地面是否有大量的水份，如有请及时进行清除处理，如果没有则检查MAU的除湿段是否工作正常。如果无尘室内的某个探头湿度低（低于40%）则检查MAU的预热段和加湿段是否工作正常，如有异常请排除故障。如果正压低于12Pa，立即检查相应该区域的门是否有未关闭的门或存在严重的泄露，如果有请做好相应的关闭处理，如果没有，请将正压控制点的设定值增大2Pa,直到正压满足要求，如果修改后，系统指标还是超标立刻通知工程部按P-PCE-COM-004文件执行。
Ensure system temperature, humidity and pressure control sepc. If temperature below 21oC, then set the sensor control point up 0.5oC; If temperature over 25oC, then set the sensor control point down 0.5oC. If any sensor humidity over 60%, check whether there is leaking water on the floor or not? If yes then clean it at once, if No then check MAU dehumidifier. If any sensor humidity below 40%,then check MAU pre-heat and humidifying, if there is any failure ,take action at once.
If pressure below 12Pa, check whether the door properly closed or any leaking? If yes, take action at once; if No, then set the sensor control point up 2 Pa, until meet the demand. If actions above fail, report to MFG follow up P-PCE-COM-004.
3. 确认系统紧急停电，在上位机上进行故障复位，并按开机顺序重新开启系统，开机过程如果系统的湿度过大或过低，可手动调节除湿阀的开度，以保证无尘室在尽可能短的时间内将参数恢复正常。
Ensure system urgency power off, reset in control PC, and restart system sequentially. If humidity over spec. during the process, adjust dehumidify valve opening, So that the parameter in Clean Room could return to normal as soon as possible.
4. 如果接到尘粒报警信号，则立即配合工程部的人员检查相应区域的的FFU的风速和高效过滤器的过滤效果，并检查相应该区域的盲板是否存在泄漏。如果风速不达标则调此台FFU的转速，如果高效过滤器的过滤效果不佳，则更换高效过滤器。如果盲板存在泄漏则重新固定盲板。参见工程部文件S-PCE-COM-030执行。
If receive particle over spec. signal, inform and assist Eng Dept. with checking FFU wind speed and HEPA filter, whether there are blind boards leaking. If wind speed is not up to the mark, adjust rotate speed of FFU at once. If HEPA filter fails to function replace it. If blind boards leaking, then re-fix them. Refer to the document of S-PCE-COM-030.
5. 检查报警区域的设备和环境清洁状况，如果存在脏物则通知工程部清洁处理。
Check alarm area equipment and environment cleaning state, if dirty, then report Eng Dept. to take actions.
5.6预防性维护：
Preventive Maintenance:
5.6.1月度维护：
Monthly Maintenance
1．检查MAU的初中效过滤器，当压差报警时对初效过滤器进行清洁或更换；
Check MAU filter, clean or replace it when DP alarms.
2．检查DCP水泵的运行状况；
Check DCP pump running state;
3．检查风淋室的初效过滤器；初效堵时对初效过滤器进行清洁或更换；
Check Air Shower RoomPre-filter; clean or replace it when blocked.
4．检查FFU的运行状况；
Check FFU running state.
5.检查RAU的运行状况；当表冷器脏时清洁表冷器
Check RAU running state; clean cooling coil if it is dirty.
5.6.2季度维护：
Quarterly Maintenance:
1．月度维护内容；
Monthly Maintenance contents;
2．检查电机外表面；
Check surface of motor;
3．检查并清理MAU的湿膜加湿器；
Check and clean MAU humidifier.
4．检查MAU中效过滤器，当压差报警时更换中效；
Check MAU MEHA filter, replace it when DP alarm;
5．检查排风机电机外表面；
Check surface of EXF motor;
6．检查MAU的高效；当其失效时更换高效；
Check HEPA filter in MAU, replace it when in failure.
7．润滑RAU及风淋室风机轴承；
Lubricate RAU and Air Shower Room EXF bearing.
5.6.3 年度维护：
Yearly Maintenance:
1．季度维护内容；
Quarterly Maintenance contents;
2．检查MAU风机扇叶是否动平衡，马达基座是否紧固；
Check MAU fan blades whether dynamic balance or not, base of motor whether tighten or not.
3．检查DCP马达基座是否紧固；
Check whether base of DCP motor tighten or not.
4．检查排风机扇叶是否动平衡，马达基座是否紧固；
Check EXF blades whether dynamic balance or not, base of motor whether tighten or not;
5．检查AHU风机马达基座是否紧固；
Check base of AHU fans motor whether tighten or not;
6．检查MAU风机电机，DCP电机，排风机电机，RAU风机电机，
AHU风机电机绝缘；
Check MAU motor, DCP motor, EXF motor, RAU motor, AHU motor insulation.
7．风淋室风机电机基座是否紧固，电机绝缘；
Check base of motor in Air Shower Room whether tighten or not, motor insulation.
5.6.4 要求：
Demand:
1．在无尘室内做维护保养时，维修人员要遵守无尘室管理规定，穿好净化服，并对维修工具进行有效的清洁；具体参见文件P-PCE-COM-059
Technician on duty must obey the rule, take cleaning cloth and clean maintenance tools when doing maintenance in Clean Room. Refer toP-PCE-COM-059
5.7操作程序流程图：
Operation flowchart: Pls find attachment.
6.0相关资料：
Relative Data:
6.1无尘室控制系统说明书；
Clean Room system user manual
6.2 FFU控制系统说明书；
FFU systemuser manual
6.3系统图纸及设备说明书
System drawing and equipment user manual
7.0记录：
Records:
7.1 Clean Room Process Report；
7.2 干盘管水温水压表；
Dry coil water temperature and pressure
7.3 无尘室P配电柜抄表；P electrical panel in clean room
7.4 无尘室S配电柜抄表；S electrical panel in clean room
7.5 无尘室系统参数超标统计表；Sensors parameters over spec record
药厂无尘室的监理要点
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