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0.1 um |
0.2 um |
0.3 um |
0.5um |
1um |
5 um |
|
ISO Class 1 |
10 |
2 |
|
|
|
|
ISO Class 2 |
100 |
24 |
10 |
4 |
||
ISO Class 3 |
1 000 |
237 |
102 |
35 |
8 |
|
ISO Class 4 |
10 000 |
2 370 |
1 020 |
352 |
83 |
|
ISO Class 5 |
100 000 |
23 700 |
10 200 |
3 520 |
832 |
29 |
ISO Class 6 |
1 000 000 |
237 000 |
102 000 |
35 200 |
8 320 |
293 |
ISO Class 7 |
|
352 000 |
83 200 |
2 930 |
||
ISO Class 8 |
|
3 520 000 |
832 000 |
29 300 |
||
ISO Class 9 |
|
35 200 000 |
8 320 000 |
293 000 |
||
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¡Ý5um |
¸¡Óξú/Á¢·½Ã× |
³Á½µ¾ú/Ãó |
|
100¼¶ |
3,500 |
0 |
5 |
1 |
10,000¼¶ |
350,000 |
2,000 |
100 |
3 |
100,000¼¶ |
3,500,000 |
20,000 |
500 |
10 |
300,000¼¶ |
10,500,000 |
60,000 |
¡ª |
15 |
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0.1 um |
0.2 um |
0.3 um |
0.5um |
5 um |
|
1 |
35 |
7.5 |
3 |
1 |
|
10 |
350 |
75 |
30 |
10 |
|
100 |
|
750 |
300 |
100 |
|
1000 |
|
|
|
1000 |
7 |
10000 |
|
|
|
10000 |
70 |
100000 |
10000 |
700 |
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0.3um |
0.5um |
5um |
10um |
25 um |
|
C |
100 |
35 |
0 |
|
|
D |
1000 |
350 |
0 |
||
E |
10000 |
3500 |
0 |
||
F |
|
3500 |
0 |
||
G |
100000 |
35000 |
200 |
0 |
|
H |
|
35000 |
200 |
0 |
|
J |
|
350000 |
2000 |
450 |
0 |
K |
|
3500000 |
20000 |
4500 |
500 |
L |
|
|
200000 |
45000 |
5000 |
M |
|
450000 |
50000 |
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·¨¹ú±ê×¼ |
µÂ¹ú±ê×¼ |
¹ú¼Ê±ê×¼ |
ÈÕ±¾±ê×¼ |
±ê×¼209D |
±ê×¼209E |
BS5295 |
AS1386 |
AFNORX44101 |
VDI2083 |
14644-1 |
JACA24 |
|
|
|
|
|
|
1 |
1 |
|
|
|
|
¡ª |
0 |
2 |
2 |
1 |
M1.5 |
C |
0.035 |
¡ª |
1 |
3 |
3 |
10 |
M2.5 |
D |
0.35 |
¡ª |
2 |
4 |
4 |
100 |
M3.5 |
E |
3.5 |
4000 |
3 |
5 |
5 |
1000 |
M4.5 |
G |
35 |
¡ª |
4 |
6 |
6 |
10000 |
M5.5 |
J |
350 |
400000 |
5 |
7 |
7 |
100000 |
M6.5 |
K |
3500 |
4000000 |
6 |
8 |
8 |
|
|
M |
|
|
7 |
9 |
¡ª |
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ISO14644½à¾»¶ÈµÈ¼¶±ê×¼ÔÎÄÁ´½Ó£ºhttp://www.iwuchen.com/a-571/
ISO14644 1-8ÖÐÓ¢ÎÄÍêÕû°æÇë²Î¿¼£ºhttp://www.iwuchen.com/a-163/