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0.1um

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0.3um

0.5um

1.0um

5.0um

ISO Class1

10

2

ISO Class2

100

24

10

4

ISO Class3

1,000

237

102

35

8

ISO Class4

10,000

2,370

1,020

352

83

ISO Class5

100,000

23,700

10,200

3,520

832

29

ISO Class6

1,000,000

237,000

102,000

35,200

8,320

293

ISO Class7

352,000

83,200

2,930

ISO Class8

3,520,000

832,000

29,300

ISO Class9

35,200,000

8,320,000

293,000

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3,500,000

20,000

500

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300,000¼¶

10,500,000

60,000

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ISO14644-1

FED STD 209E

CLASS

Number of Par Cubic Meter by Micrometer Size

ISO Class

English

Metric

 

0.1um

0.2um

0.3um

0.5um

0.5um

5um

 

 

 

 

m3

m3

m3

ft3

m3

 

1

 

 

ISO1

10

2

 

 

 

 

2

 

 

ISO2

100

26

10

 

4

 

3

1

M1.5

1SO3

1,000

265

106

 

35

 

4

10

M2.5

ISO4

10,000

2,650

1,060

10

353

 

5(°Ù¼¶)

100

M3.5

ISO5

100,000

26,500

10,600

100

3,530

29

6(ǧ¼¶)

1,000

M4.5

ISO6

1,000,000

265,000

106,000

1000

35,300

293

7(Íò¼¶)

10,000

M5.5

ISO7

 

 

 

10000

353,000

2,930

8(Ê®Íò¼¶)

100,000

M6.5

ISO8

 

 

 

100000

3,530,000

29,300

9

 

 

ISO9

 

 

 

1000000

35,300,000

293,000

 


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100

3500

0

5

1

10000

350,000

2,000

100

3

100000

3,500,000

20,000

500

10

300000

10,500,000

61,800

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15

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ISO
14644-1(1999)

US
209E(1992)

US
209D(1988)

EEC
GGMP(1989)

FRANCE
AFNOR(1981)

GERMANY
VDI 2083(1990)

JAPAN
JAOA(1989)

1

-

-

-

-

-

-

-

3.5

2

-

-

-

-

0

2

10.0

-

M1

-

-

-

-

-

35.3

3

M1.5

1

-

-

1

3

100

-

M2

-

-

-

-

-

353

4

M2.5

10

-

-

2

4

1,000

-

M3

-

-

-

-

-

3,530

5

M3.5

100

A+B

4,000

3

5

10,000

-

M4

-

-

-

-

-

35,300

6

M4.5

1,000

1,000

-

4

6

100,000

-

M5

-

-

-

-

-

353,000

7

M5.5

10,000

C

400,000

5

7

1,000,000

-

M6

-

-

-

-

-

3,530,000

8

M6.5

100,000

D

4,000,000

6

8

10,000,000

-

M7

-

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0.1um

0.2um

0.3um

0.5um

1um

5um

1

10

2

 

 

 

 

2

100

24

10

4

 

 

3

1000

237

102

35

8

 

4£¨Ê®¼¶£©

10000

2370

1020

352

83

 

5£¨°Ù¼¶£©

100000

23700

10200

3520

832

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237000

102000

35200

8320

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352000

83200

2930

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3520000

832000

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35200000

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