ISO 14644-2:2015¸ø³öÁË
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¡°After observing and recording the normal operating ranges, it is recommended that a pressure setting for the warning pressure measurement device be selected a few Pascal below the lowest pressure observation for a positive-pressure£¨Ñ¹²îÉÏÏÞ£© configuration, or a few Pascal above in a negative-pressure £¨Ñ¹²îÏÂÏÞ£©configuration (guidance value 2 Pa to 3 Pa).
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¡°It is often necessary to delay the alert or action alarm to allow for normal activity in the cleanroom, such as the opening of doors to permit entry and exit of personnel. Careful observation of the duration of typical or expected normal deviation is necessary to determine appropriate time delay.Deviations that extend beyond the normal durations should activate warnings.
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Air locks are designed to help maintain pressure differentials as personnel or
materials move from one cleanroom or clean zone to another. Air locks are designed or operated so that one opposing door set is always closed. However, unless the doors are equipped with inflatable seals, the leakage through the airlock is usually greater when one of the opposing door sets is open than when they are both closed.
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It is necessary to test and document these normal variations to properly set alert and action levels for pressure alarms. Follow this procedure:
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close all doors and pass-through hatches, define the operational status of any equipment, and observe the steady-state pressure differentials between the selected rooms or zones noting the small, normal fluctuations that will occur due to wind and other dynamic effects;
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for each airlock, pass-through hatch or transfer chamber, open allthe doors, one set of opposing doors at a time, and note room- or zone-pressurevariation. Close the doors and confirm that the pressure differentials return to theiroriginal values;
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leakage paths, such as those around doors, should be evaluated as part of a cleanroom design to ensure adequate allowance is made in the air balance for such leakages.
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